6/6/2010	12:58:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2010	12:58:20 PM	Recipe started at 12:58 PM
6/6/2010	12:58:20 PM	H2 valve closed
6/6/2010	12:58:20 PM	BCl3 valve closed
6/6/2010	12:58:20 PM	PH3 valve closed
6/6/2010	12:58:20 PM	SiCl4 pre valve closed
6/6/2010	12:58:20 PM	SiCl4 post valve closed
6/6/2010	12:58:20 PM	Main Vac valve closed
6/6/2010	12:58:20 PM	Bypass valve closed
6/6/2010	12:58:20 PM	Bubbler valve closed
6/6/2010	12:58:20 PM	Helium valve opened
6/6/2010	12:58:20 PM	Helium MFC set to  500.000000
6/6/2010	12:58:20 PM	H2 MFC set to  0.000000
6/6/2010	12:58:20 PM	BCl3 MFC set to  0.000000
6/6/2010	12:58:20 PM	PHl3 MFC set to  0.000000
6/6/2010	12:58:20 PM	SiCl4 MFC set to  0.000000
6/6/2010	12:58:20 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	12:58:20 PM	Tube furnace set to 0
6/6/2010	12:59:04 PM	Helium valve closed
6/6/2010	12:59:04 PM	H2 valve closed
6/6/2010	12:59:04 PM	BCl3 valve closed
6/6/2010	12:59:04 PM	PH3 valve closed
6/6/2010	12:59:04 PM	SiCl4 pre valve closed
6/6/2010	12:59:04 PM	SiCl4 post valve closed
6/6/2010	12:59:04 PM	Main Vac valve closed
6/6/2010	12:59:04 PM	Bypass valve closed
6/6/2010	12:59:04 PM	Bubbler valve closed
6/6/2010	12:59:04 PM	Helium MFC set to  0.000000
6/6/2010	12:59:04 PM	H2 MFC set to  0.000000
6/6/2010	12:59:04 PM	BCl3 MFC set to  0.000000
6/6/2010	12:59:04 PM	PHl3 MFC set to  0.000000
6/6/2010	12:59:04 PM	SiCl4 MFC set to  0.000000
6/6/2010	12:59:04 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	12:59:04 PM	Tube furnace set to 0
6/6/2010	12:59:05 PM	Run finished at 12:59 PM
6/6/2010	12:59:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2010	1:06:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/6/2010	1:06:14 PM	Recipe started at 1:06 PM
6/6/2010	1:06:14 PM	H2 valve closed
6/6/2010	1:06:14 PM	BCl3 valve closed
6/6/2010	1:06:14 PM	PH3 valve closed
6/6/2010	1:06:14 PM	SiCl4 pre valve closed
6/6/2010	1:06:14 PM	SiCl4 post valve closed
6/6/2010	1:06:14 PM	Main Vac valve closed
6/6/2010	1:06:14 PM	Bypass valve closed
6/6/2010	1:06:14 PM	Bubbler valve closed
6/6/2010	1:06:14 PM	Helium valve opened
6/6/2010	1:06:14 PM	Helium MFC set to  500.000000
6/6/2010	1:06:14 PM	H2 MFC set to  0.000000
6/6/2010	1:06:14 PM	BCl3 MFC set to  0.000000
6/6/2010	1:06:14 PM	PHl3 MFC set to  0.000000
6/6/2010	1:06:14 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:06:14 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:06:14 PM	Tube furnace set to 0
6/6/2010	1:06:16 PM	Helium valve closed
6/6/2010	1:06:16 PM	H2 valve closed
6/6/2010	1:06:16 PM	BCl3 valve closed
6/6/2010	1:06:16 PM	PH3 valve closed
6/6/2010	1:06:17 PM	SiCl4 pre valve closed
6/6/2010	1:06:17 PM	SiCl4 post valve closed
6/6/2010	1:06:17 PM	Main Vac valve closed
6/6/2010	1:06:17 PM	Bypass valve closed
6/6/2010	1:06:17 PM	Bubbler valve closed
6/6/2010	1:06:17 PM	Helium MFC set to  0.000000
6/6/2010	1:06:17 PM	H2 MFC set to  0.000000
6/6/2010	1:06:17 PM	BCl3 MFC set to  0.000000
6/6/2010	1:06:17 PM	PHl3 MFC set to  0.000000
6/6/2010	1:06:17 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:06:17 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:06:17 PM	Tube furnace set to 0
6/6/2010	1:06:19 PM	Helium valve closed
6/6/2010	1:06:19 PM	H2 valve closed
6/6/2010	1:06:19 PM	BCl3 valve closed
6/6/2010	1:06:19 PM	PH3 valve closed
6/6/2010	1:06:19 PM	SiCl4 pre valve closed
6/6/2010	1:06:19 PM	SiCl4 post valve closed
6/6/2010	1:06:19 PM	Main Vac valve closed
6/6/2010	1:06:19 PM	Bubbler valve closed
6/6/2010	1:06:19 PM	Bypass valve opened
6/6/2010	1:06:19 PM	Helium MFC set to  0.000000
6/6/2010	1:06:19 PM	H2 MFC set to  0.000000
6/6/2010	1:06:19 PM	BCl3 MFC set to  0.000000
6/6/2010	1:06:19 PM	PHl3 MFC set to  0.000000
6/6/2010	1:06:19 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:06:19 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:06:19 PM	Tube furnace set to 0
6/6/2010	1:07:08 PM	Helium valve closed
6/6/2010	1:07:08 PM	H2 valve closed
6/6/2010	1:07:08 PM	BCl3 valve closed
6/6/2010	1:07:08 PM	PH3 valve closed
6/6/2010	1:07:08 PM	SiCl4 pre valve closed
6/6/2010	1:07:08 PM	SiCl4 post valve closed
6/6/2010	1:07:08 PM	Bubbler valve closed
6/6/2010	1:07:08 PM	Main Vac valve opened
6/6/2010	1:07:08 PM	Bypass valve opened
6/6/2010	1:07:08 PM	Helium MFC set to  0.000000
6/6/2010	1:07:08 PM	H2 MFC set to  0.000000
6/6/2010	1:07:08 PM	BCl3 MFC set to  0.000000
6/6/2010	1:07:08 PM	PHl3 MFC set to  0.000000
6/6/2010	1:07:08 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:07:08 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:07:08 PM	Tube furnace set to 0
6/6/2010	1:07:26 PM	Run aborted at 1:07 PM
6/6/2010	1:07:26 PM	Helium valve closed
6/6/2010	1:07:26 PM	H2 valve closed
6/6/2010	1:07:26 PM	BCl3 valve closed
6/6/2010	1:07:26 PM	PH3 valve closed
6/6/2010	1:07:26 PM	SiCl4 pre valve closed
6/6/2010	1:07:26 PM	SiCl4 post valve closed
6/6/2010	1:07:26 PM	Bypass valve closed
6/6/2010	1:07:26 PM	Main Vac valve closed
6/6/2010	1:07:26 PM	Bubbler valve closed
6/6/2010	1:07:26 PM	Helium MFC set to  0.000000
6/6/2010	1:07:26 PM	H2 MFC set to  0.000000
6/6/2010	1:07:26 PM	BCl3 MFC set to  0.000000
6/6/2010	1:07:26 PM	PHl3 MFC set to  0.000000
6/6/2010	1:07:26 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:07:26 PM	Tube furnace set to 0
6/6/2010	1:07:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/6/2010	1:07:28 PM	Main Vac valve closed
6/6/2010	1:07:29 PM	Main Vac valve opened
6/6/2010	1:07:30 PM	Bypass valve closed
6/6/2010	1:07:34 PM	Bypass valve opened
6/6/2010	1:09:00 PM	Recipe started at 1:08 PM
6/6/2010	1:09:00 PM	Helium valve closed
6/6/2010	1:09:00 PM	H2 valve closed
6/6/2010	1:09:00 PM	BCl3 valve closed
6/6/2010	1:09:00 PM	PH3 valve closed
6/6/2010	1:09:00 PM	SiCl4 pre valve closed
6/6/2010	1:09:00 PM	SiCl4 post valve closed
6/6/2010	1:09:00 PM	Main Vac valve closed
6/6/2010	1:09:00 PM	Bubbler valve closed
6/6/2010	1:09:00 PM	Bypass valve opened
6/6/2010	1:09:00 PM	Helium MFC set to  0.000000
6/6/2010	1:09:00 PM	H2 MFC set to  0.000000
6/6/2010	1:09:00 PM	BCl3 MFC set to  0.000000
6/6/2010	1:09:00 PM	PHl3 MFC set to  0.000000
6/6/2010	1:09:00 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:09:00 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:09:00 PM	Tube furnace set to 0
6/6/2010	1:09:00 PM	Helium valve closed
6/6/2010	1:09:00 PM	H2 valve closed
6/6/2010	1:09:00 PM	BCl3 valve closed
6/6/2010	1:09:00 PM	PH3 valve closed
6/6/2010	1:09:00 PM	SiCl4 pre valve closed
6/6/2010	1:09:00 PM	SiCl4 post valve closed
6/6/2010	1:09:00 PM	Bubbler valve closed
6/6/2010	1:09:00 PM	Main Vac valve opened
6/6/2010	1:09:00 PM	Bypass valve opened
6/6/2010	1:09:00 PM	Helium MFC set to  0.000000
6/6/2010	1:09:00 PM	H2 MFC set to  0.000000
6/6/2010	1:09:00 PM	BCl3 MFC set to  0.000000
6/6/2010	1:09:00 PM	PHl3 MFC set to  0.000000
6/6/2010	1:09:00 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:09:00 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:09:01 PM	Tube furnace set to 0
6/6/2010	1:10:01 PM	H2 valve closed
6/6/2010	1:10:01 PM	BCl3 valve closed
6/6/2010	1:10:01 PM	PH3 valve closed
6/6/2010	1:10:01 PM	SiCl4 pre valve closed
6/6/2010	1:10:01 PM	SiCl4 post valve closed
6/6/2010	1:10:01 PM	Bubbler valve closed
6/6/2010	1:10:01 PM	Helium valve opened
6/6/2010	1:10:01 PM	Main Vac valve opened
6/6/2010	1:10:01 PM	Bypass valve opened
6/6/2010	1:10:01 PM	Helium MFC set to  500.000000
6/6/2010	1:10:01 PM	H2 MFC set to  0.000000
6/6/2010	1:10:01 PM	BCl3 MFC set to  0.000000
6/6/2010	1:10:01 PM	PHl3 MFC set to  0.000000
6/6/2010	1:10:01 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:10:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:10:01 PM	Tube furnace set to 0
6/6/2010	1:12:01 PM	Helium valve closed
6/6/2010	1:12:01 PM	H2 valve closed
6/6/2010	1:12:01 PM	BCl3 valve closed
6/6/2010	1:12:01 PM	PH3 valve closed
6/6/2010	1:12:01 PM	SiCl4 pre valve closed
6/6/2010	1:12:01 PM	SiCl4 post valve closed
6/6/2010	1:12:01 PM	Bubbler valve closed
6/6/2010	1:12:01 PM	Main Vac valve opened
6/6/2010	1:12:01 PM	Bypass valve opened
6/6/2010	1:12:01 PM	Helium MFC set to  0.000000
6/6/2010	1:12:01 PM	H2 MFC set to  0.000000
6/6/2010	1:12:01 PM	BCl3 MFC set to  0.000000
6/6/2010	1:12:01 PM	PHl3 MFC set to  0.000000
6/6/2010	1:12:01 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:12:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:12:01 PM	Tube furnace set to 0
6/6/2010	1:13:01 PM	H2 valve closed
6/6/2010	1:13:01 PM	BCl3 valve closed
6/6/2010	1:13:01 PM	PH3 valve closed
6/6/2010	1:13:01 PM	SiCl4 pre valve closed
6/6/2010	1:13:01 PM	SiCl4 post valve closed
6/6/2010	1:13:01 PM	Bubbler valve closed
6/6/2010	1:13:01 PM	Helium valve opened
6/6/2010	1:13:01 PM	Main Vac valve opened
6/6/2010	1:13:01 PM	Bypass valve opened
6/6/2010	1:13:01 PM	Helium MFC set to  500.000000
6/6/2010	1:13:01 PM	H2 MFC set to  0.000000
6/6/2010	1:13:01 PM	BCl3 MFC set to  0.000000
6/6/2010	1:13:01 PM	PHl3 MFC set to  0.000000
6/6/2010	1:13:01 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:13:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:13:01 PM	Tube furnace set to 0
6/6/2010	1:15:01 PM	Helium valve closed
6/6/2010	1:15:01 PM	H2 valve closed
6/6/2010	1:15:01 PM	BCl3 valve closed
6/6/2010	1:15:01 PM	PH3 valve closed
6/6/2010	1:15:01 PM	SiCl4 pre valve closed
6/6/2010	1:15:01 PM	SiCl4 post valve closed
6/6/2010	1:15:01 PM	Bubbler valve closed
6/6/2010	1:15:01 PM	Main Vac valve opened
6/6/2010	1:15:01 PM	Bypass valve opened
6/6/2010	1:15:01 PM	Helium MFC set to  0.000000
6/6/2010	1:15:01 PM	H2 MFC set to  0.000000
6/6/2010	1:15:01 PM	BCl3 MFC set to  0.000000
6/6/2010	1:15:01 PM	PHl3 MFC set to  0.000000
6/6/2010	1:15:01 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:15:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:15:01 PM	Tube furnace set to 0
6/6/2010	1:16:01 PM	H2 valve closed
6/6/2010	1:16:01 PM	BCl3 valve closed
6/6/2010	1:16:01 PM	PH3 valve closed
6/6/2010	1:16:01 PM	SiCl4 pre valve closed
6/6/2010	1:16:01 PM	SiCl4 post valve closed
6/6/2010	1:16:01 PM	Bubbler valve closed
6/6/2010	1:16:01 PM	Helium valve opened
6/6/2010	1:16:01 PM	Main Vac valve opened
6/6/2010	1:16:01 PM	Bypass valve opened
6/6/2010	1:16:01 PM	Helium MFC set to  500.000000
6/6/2010	1:16:01 PM	H2 MFC set to  0.000000
6/6/2010	1:16:01 PM	BCl3 MFC set to  0.000000
6/6/2010	1:16:01 PM	PHl3 MFC set to  0.000000
6/6/2010	1:16:01 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:16:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:16:01 PM	Tube furnace set to 0
6/6/2010	1:18:02 PM	Helium valve closed
6/6/2010	1:18:02 PM	H2 valve closed
6/6/2010	1:18:02 PM	BCl3 valve closed
6/6/2010	1:18:02 PM	PH3 valve closed
6/6/2010	1:18:02 PM	SiCl4 pre valve closed
6/6/2010	1:18:02 PM	SiCl4 post valve closed
6/6/2010	1:18:02 PM	Bubbler valve closed
6/6/2010	1:18:02 PM	Main Vac valve opened
6/6/2010	1:18:02 PM	Bypass valve opened
6/6/2010	1:18:02 PM	Helium MFC set to  0.000000
6/6/2010	1:18:02 PM	H2 MFC set to  0.000000
6/6/2010	1:18:02 PM	BCl3 MFC set to  0.000000
6/6/2010	1:18:02 PM	PHl3 MFC set to  0.000000
6/6/2010	1:18:02 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:18:02 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:18:02 PM	Tube furnace set to 0
6/6/2010	1:19:02 PM	H2 valve closed
6/6/2010	1:19:02 PM	BCl3 valve closed
6/6/2010	1:19:02 PM	PH3 valve closed
6/6/2010	1:19:02 PM	SiCl4 pre valve closed
6/6/2010	1:19:02 PM	SiCl4 post valve closed
6/6/2010	1:19:02 PM	Bubbler valve closed
6/6/2010	1:19:02 PM	Helium valve opened
6/6/2010	1:19:02 PM	Main Vac valve opened
6/6/2010	1:19:02 PM	Bypass valve opened
6/6/2010	1:19:02 PM	Helium MFC set to  500.000000
6/6/2010	1:19:02 PM	H2 MFC set to  0.000000
6/6/2010	1:19:02 PM	BCl3 MFC set to  0.000000
6/6/2010	1:19:02 PM	PHl3 MFC set to  0.000000
6/6/2010	1:19:02 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:19:02 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:19:02 PM	Tube furnace set to 0
6/6/2010	1:21:02 PM	Helium valve closed
6/6/2010	1:21:02 PM	H2 valve closed
6/6/2010	1:21:02 PM	BCl3 valve closed
6/6/2010	1:21:02 PM	PH3 valve closed
6/6/2010	1:21:02 PM	SiCl4 pre valve closed
6/6/2010	1:21:02 PM	SiCl4 post valve closed
6/6/2010	1:21:02 PM	Bubbler valve closed
6/6/2010	1:21:02 PM	Main Vac valve opened
6/6/2010	1:21:02 PM	Bypass valve opened
6/6/2010	1:21:02 PM	Helium MFC set to  0.000000
6/6/2010	1:21:02 PM	H2 MFC set to  0.000000
6/6/2010	1:21:02 PM	BCl3 MFC set to  0.000000
6/6/2010	1:21:02 PM	PHl3 MFC set to  0.000000
6/6/2010	1:21:02 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:21:02 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:21:02 PM	Tube furnace set to 0
6/6/2010	1:22:02 PM	H2 valve closed
6/6/2010	1:22:02 PM	BCl3 valve closed
6/6/2010	1:22:02 PM	PH3 valve closed
6/6/2010	1:22:02 PM	SiCl4 pre valve closed
6/6/2010	1:22:02 PM	SiCl4 post valve closed
6/6/2010	1:22:02 PM	Bubbler valve closed
6/6/2010	1:22:02 PM	Helium valve opened
6/6/2010	1:22:02 PM	Main Vac valve opened
6/6/2010	1:22:02 PM	Bypass valve opened
6/6/2010	1:22:02 PM	Helium MFC set to  500.000000
6/6/2010	1:22:02 PM	H2 MFC set to  0.000000
6/6/2010	1:22:02 PM	BCl3 MFC set to  0.000000
6/6/2010	1:22:02 PM	PHl3 MFC set to  0.000000
6/6/2010	1:22:02 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:22:02 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:22:02 PM	Tube furnace set to 0
6/6/2010	1:24:02 PM	Helium valve closed
6/6/2010	1:24:02 PM	H2 valve closed
6/6/2010	1:24:02 PM	BCl3 valve closed
6/6/2010	1:24:02 PM	PH3 valve closed
6/6/2010	1:24:02 PM	SiCl4 pre valve closed
6/6/2010	1:24:02 PM	SiCl4 post valve closed
6/6/2010	1:24:02 PM	Bubbler valve closed
6/6/2010	1:24:02 PM	Main Vac valve opened
6/6/2010	1:24:02 PM	Bypass valve opened
6/6/2010	1:24:02 PM	Helium MFC set to  0.000000
6/6/2010	1:24:02 PM	H2 MFC set to  0.000000
6/6/2010	1:24:02 PM	BCl3 MFC set to  0.000000
6/6/2010	1:24:02 PM	PHl3 MFC set to  0.000000
6/6/2010	1:24:02 PM	SiCl4 MFC set to  0.000000
6/6/2010	1:24:02 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	1:24:02 PM	Tube furnace set to 0
6/6/2010	1:24:03 PM	Run finished at 1:24 PM
6/6/2010	1:32:46 PM	Helium MFC set to  500.000000
6/6/2010	1:32:47 PM	Helium valve opened
6/6/2010	1:38:22 PM	Helium valve closed
6/6/2010	1:41:15 PM	Helium MFC set to  500.000000
6/6/2010	1:41:16 PM	Helium valve opened
6/6/2010	2:07:48 PM	Helium MFC set to  0.000000
6/6/2010	2:07:49 PM	Helium valve closed
6/6/2010	2:08:47 PM	Bypass valve closed
6/6/2010	2:08:48 PM	Main Vac valve closed
6/6/2010	2:08:56 PM	Bypass valve opened
6/6/2010	2:08:57 PM	Main Vac valve opened
6/6/2010	2:09:25 PM	Recipe started at 2:09 PM
6/6/2010	2:09:25 PM	Helium valve closed
6/6/2010	2:09:26 PM	BCl3 valve closed
6/6/2010	2:09:26 PM	PH3 valve closed
6/6/2010	2:09:26 PM	SiCl4 pre valve closed
6/6/2010	2:09:26 PM	SiCl4 post valve closed
6/6/2010	2:09:26 PM	Main Vac valve closed
6/6/2010	2:09:26 PM	Bypass valve closed
6/6/2010	2:09:26 PM	Bubbler valve closed
6/6/2010	2:09:26 PM	H2 valve opened
6/6/2010	2:09:26 PM	Helium MFC set to  0.000000
6/6/2010	2:09:26 PM	H2 MFC set to  500.000000
6/6/2010	2:09:26 PM	BCl3 MFC set to  0.000000
6/6/2010	2:09:26 PM	PHl3 MFC set to  0.000000
6/6/2010	2:09:26 PM	SiCl4 MFC set to  0.000000
6/6/2010	2:09:26 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	2:09:26 PM	Tube furnace set to 0
6/6/2010	2:10:48 PM	Helium valve closed
6/6/2010	2:10:48 PM	BCl3 valve closed
6/6/2010	2:10:48 PM	PH3 valve closed
6/6/2010	2:10:48 PM	SiCl4 pre valve closed
6/6/2010	2:10:48 PM	SiCl4 post valve closed
6/6/2010	2:10:48 PM	Main Vac valve closed
6/6/2010	2:10:48 PM	Bypass valve closed
6/6/2010	2:10:48 PM	H2 valve opened
6/6/2010	2:10:48 PM	Bubbler valve opened
6/6/2010	2:10:48 PM	Helium MFC set to  0.000000
6/6/2010	2:10:48 PM	H2 MFC set to  500.000000
6/6/2010	2:10:48 PM	BCl3 MFC set to  0.000000
6/6/2010	2:10:48 PM	PHl3 MFC set to  0.000000
6/6/2010	2:10:48 PM	SiCl4 MFC set to  0.000000
6/6/2010	2:10:48 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	2:10:49 PM	Tube furnace set to 1000
6/6/2010	2:30:49 PM	Helium valve closed
6/6/2010	2:30:49 PM	PH3 valve closed
6/6/2010	2:30:49 PM	Main Vac valve closed
6/6/2010	2:30:49 PM	Bypass valve closed
6/6/2010	2:30:49 PM	H2 valve opened
6/6/2010	2:30:49 PM	BCl3 valve opened
6/6/2010	2:30:49 PM	SiCl4 pre valve opened
6/6/2010	2:30:49 PM	SiCl4 post valve opened
6/6/2010	2:30:49 PM	Bubbler valve opened
6/6/2010	2:30:49 PM	Helium MFC set to  0.000000
6/6/2010	2:30:49 PM	H2 MFC set to  500.000000
6/6/2010	2:30:49 PM	BCl3 MFC set to  35.000000
6/6/2010	2:30:49 PM	PHl3 MFC set to  0.000000
6/6/2010	2:30:49 PM	SiCl4 MFC set to  50.000000
6/6/2010	2:30:49 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	2:30:49 PM	Tube furnace set to 1000
6/6/2010	2:45:49 PM	H2 valve closed
6/6/2010	2:45:49 PM	BCl3 valve closed
6/6/2010	2:45:49 PM	PH3 valve closed
6/6/2010	2:45:49 PM	SiCl4 pre valve closed
6/6/2010	2:45:49 PM	SiCl4 post valve closed
6/6/2010	2:45:49 PM	Main Vac valve closed
6/6/2010	2:45:49 PM	Bypass valve closed
6/6/2010	2:45:49 PM	Helium valve opened
6/6/2010	2:45:49 PM	Bubbler valve opened
6/6/2010	2:45:49 PM	Helium MFC set to  500.000000
6/6/2010	2:45:49 PM	H2 MFC set to  0.000000
6/6/2010	2:45:49 PM	BCl3 MFC set to  0.000000
6/6/2010	2:45:49 PM	PHl3 MFC set to  0.000000
6/6/2010	2:45:49 PM	SiCl4 MFC set to  0.000000
6/6/2010	2:45:49 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	2:45:49 PM	Tube furnace set to 0
6/6/2010	3:05:49 PM	Helium valve closed
6/6/2010	3:05:49 PM	H2 valve closed
6/6/2010	3:05:49 PM	BCl3 valve closed
6/6/2010	3:05:49 PM	PH3 valve closed
6/6/2010	3:05:49 PM	SiCl4 pre valve closed
6/6/2010	3:05:49 PM	SiCl4 post valve closed
6/6/2010	3:05:49 PM	Main Vac valve closed
6/6/2010	3:05:49 PM	Bypass valve closed
6/6/2010	3:05:49 PM	Bubbler valve closed
6/6/2010	3:05:49 PM	Helium MFC set to  0.000000
6/6/2010	3:05:49 PM	H2 MFC set to  0.000000
6/6/2010	3:05:49 PM	BCl3 MFC set to  0.000000
6/6/2010	3:05:49 PM	PHl3 MFC set to  0.000000
6/6/2010	3:05:49 PM	SiCl4 MFC set to  0.000000
6/6/2010	3:05:49 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	3:05:49 PM	Tube furnace set to 0
6/6/2010	3:05:49 PM	Run finished at 3:05 PM
6/6/2010	3:29:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2010	3:29:16 PM	Recipe started at 3:29 PM
6/6/2010	3:29:16 PM	H2 valve closed
6/6/2010	3:29:16 PM	BCl3 valve closed
6/6/2010	3:29:16 PM	PH3 valve closed
6/6/2010	3:29:16 PM	SiCl4 pre valve closed
6/6/2010	3:29:16 PM	SiCl4 post valve closed
6/6/2010	3:29:16 PM	Main Vac valve closed
6/6/2010	3:29:16 PM	Bypass valve closed
6/6/2010	3:29:16 PM	Bubbler valve closed
6/6/2010	3:29:16 PM	Helium valve opened
6/6/2010	3:29:16 PM	Helium MFC set to  500.000000
6/6/2010	3:29:16 PM	H2 MFC set to  0.000000
6/6/2010	3:29:16 PM	BCl3 MFC set to  0.000000
6/6/2010	3:29:16 PM	PHl3 MFC set to  0.000000
6/6/2010	3:29:16 PM	SiCl4 MFC set to  0.000000
6/6/2010	3:29:16 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	3:29:16 PM	Tube furnace set to 0
6/6/2010	3:29:16 PM	Helium valve closed
6/6/2010	3:29:16 PM	H2 valve closed
6/6/2010	3:29:16 PM	BCl3 valve closed
6/6/2010	3:29:16 PM	PH3 valve closed
6/6/2010	3:29:17 PM	SiCl4 pre valve closed
6/6/2010	3:29:17 PM	SiCl4 post valve closed
6/6/2010	3:29:17 PM	Main Vac valve closed
6/6/2010	3:29:17 PM	Bypass valve closed
6/6/2010	3:29:17 PM	Bubbler valve closed
6/6/2010	3:29:17 PM	Helium MFC set to  0.000000
6/6/2010	3:29:17 PM	H2 MFC set to  0.000000
6/6/2010	3:29:17 PM	BCl3 MFC set to  0.000000
6/6/2010	3:29:17 PM	PHl3 MFC set to  0.000000
6/6/2010	3:29:17 PM	SiCl4 MFC set to  0.000000
6/6/2010	3:29:17 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	3:29:17 PM	Tube furnace set to 0
6/6/2010	3:29:17 PM	Run finished at 3:29 PM
6/6/2010	3:29:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2010	3:30:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2010	3:30:48 PM	Recipe started at 3:30 PM
6/6/2010	3:30:48 PM	Helium valve closed
6/6/2010	3:30:48 PM	H2 valve closed
6/6/2010	3:30:48 PM	BCl3 valve closed
6/6/2010	3:30:48 PM	PH3 valve closed
6/6/2010	3:30:48 PM	SiCl4 pre valve closed
6/6/2010	3:30:48 PM	SiCl4 post valve closed
6/6/2010	3:30:48 PM	Main Vac valve closed
6/6/2010	3:30:48 PM	Bubbler valve closed
6/6/2010	3:30:48 PM	Bypass valve opened
6/6/2010	3:30:48 PM	Helium MFC set to  0.000000
6/6/2010	3:30:48 PM	H2 MFC set to  0.000000
6/6/2010	3:30:48 PM	BCl3 MFC set to  0.000000
6/6/2010	3:30:48 PM	PHl3 MFC set to  0.000000
6/6/2010	3:30:48 PM	SiCl4 MFC set to  0.000000
6/6/2010	3:30:48 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	3:30:48 PM	Tube furnace set to 0
6/6/2010	3:31:35 PM	Helium valve closed
6/6/2010	3:31:35 PM	H2 valve closed
6/6/2010	3:31:35 PM	BCl3 valve closed
6/6/2010	3:31:35 PM	PH3 valve closed
6/6/2010	3:31:35 PM	SiCl4 pre valve closed
6/6/2010	3:31:35 PM	SiCl4 post valve closed
6/6/2010	3:31:35 PM	Bubbler valve closed
6/6/2010	3:31:35 PM	Main Vac valve opened
6/6/2010	3:31:35 PM	Bypass valve opened
6/6/2010	3:31:35 PM	Helium MFC set to  0.000000
6/6/2010	3:31:35 PM	H2 MFC set to  0.000000
6/6/2010	3:31:35 PM	BCl3 MFC set to  0.000000
6/6/2010	3:31:35 PM	PHl3 MFC set to  0.000000
6/6/2010	3:31:35 PM	SiCl4 MFC set to  0.000000
6/6/2010	3:31:35 PM	Bypass solenoid MFC set to  0.000000
6/6/2010	3:31:35 PM	Tube furnace set to 0
6/6/2010	3:31:35 PM	Run finished at 3:31 PM
6/6/2010	3:31:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
